III-V group MBE (Molecular Beam Epitaxy)
| Base pressure | 1×10-10Torr | 
| Installed sources | Ga,Al,In(Group III) Si, Be (Dopants) Mn, Fe (Transition element, for magnetic material) As(Group V) EPI Valved cracker cell 500 cc Sb (group V) MBE Komponenten valved cracker cell 420 cc | 
| In-situ observation | Reflection High Energy Electron Diffraction (RHEED) | 

IV group MBE (Molecular Beam Epitaxy)
| Installed sources | Si, Ge(IV group) B (Dopant) Mn, Co, Fe, MgO | 
| In-situ observation | Reflection High Energy Electron Diffraction, RHEED) | 

He-3 Magnetotransport Measurement System (300 mK)
| Temperature range : 300mK ~ RT | 
| Magnetic field range : ~1T | 

Cryogenic Magnetotransport Measurement Systems(3 systems)
| Temperature range : 3.5K~RT | 
| Magnetic field range : ~1T | 
| With rotating motor | 

Magnetic Circular Dichroism (MCD) System – 
JASCO J700 

| Photo-detector | : | GaAs, S1 Photomultiplier (wavelength range 0.2-1.1μm) | 
| Magnetic field range | : | ~1.2T | 
| Temperature range | : | 4.5K ~ RT |